SEMIXICON: a U.S.-based Supplier and Fabricator of Electrostatic Chucks (ESC or E-chuck)

SEMIXICON

U.S.-based Supplier and Fabricator of Electrostatic Chucks (ESC or E-chuck)

An electrostatic chuck (ESC) is a vital component in semiconductor manufacturing, designed to securely hold wafers or substrates during processes such as etching, deposition, and lithography. SEMIXICON specializes in fabricating high-quality ESCs tailored to meet specific customer requirements.

Specifications

Material

High-purity ceramics such as Alumina (Al₂O₃) or Aluminum Nitride (AlN), recognized for superior thermal and electrical properties.

Dimensions

Wafer Compatibility: Supports standard wafer sizes, including 200 mm, 300 mm, and up to 450 mm in diameter.

Ceramic Thickness: Customizable from 0.8 mm to 10.0 mm based on design requirements.

Operating Temperature

Wide operational range from -50°C to +700°C, accommodating diverse semiconductor processes.

Electrode Configuration

Available in monopolar, bipolar, or multipolar designs to optimize clamping force distribution.

Surface Features

Custom surface treatments, including grooving or embossing, improve wafer handling and minimize particle generation.

Additional Functions

Heating Capability: Embedded heating elements provide precise temperature control, with a variance of ±1°C.

Cooling Capability: High thermal conductivity materials and cooling plates ensure efficient wafer cooling.

Electrical Specifications

Operating Voltage: 1.5 kV to 5 kV, tailored to application needs.

Power Supply Requirements: Reversible polarity and precision-controlled high-voltage supplies for effective chucking and de-chucking.

Corrosion Resistance

Exceptional resistance to corrosive process gases, including halogens, ensuring extended durability.

Customization

SEMIXICON provides tailored solutions to meet process-specific needs, including:

Material selection

Dimensions

Electrode configurations

Additional features

Contact Us for MCA ESC or MCA E-Chuck:

📧 sales@semixicon.com

🌐 www.semixicon.com

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