SEMIXICON, a U.S.-based supplier and fabricator, offers specialized services for semiconductor wafer chuck tables

SEMIXICON, a U.S.-based supplier and fabricator, offers specialized services for semiconductor wafer chuck tables, including:

Design

Thinning

Grinding

Polishing

Refurbishing

Reconditioning

Modification

Duplication

Customization

Our expertise ensures your wafer chuck tables meet the highest standards of quality and precision.

Product Highlights:

Porous Ceramic Chucks: We provide brand new and refurbished porous ceramic chucks compatible with equipment from manufacturers such as Disco, ADT, K&S, Applied Materials, TSK, OKAMOTO, Micro Automation, and Load Point. Available in standard sizes (4", 5", 6", 8", 12") and various shapes, including round, square, oval, and custom configurations. We also offer extra-large flat chucks up to 500mm x 5000mm, with surface flatness precision up to sub-micron levels.

Electrostatic Chucks (ESC): Our services include refurbishment, rebuilding, and custom design of various electrostatic chucks. The refurbishment process involves removing deposition material, resealing ceramic and heater components, and resurfacing the wafer contact surface.

SiC & SiSiC Wafer Chucks: We offer wafer chucks made of silicon carbide (SiC) and silicon-infiltrated silicon carbide (SiSiC), known for their rapid thermal response, wear resistance, and extended service life. These materials are lightweight yet hard, with thermal expansion rates similar to silicon, making them ideal for handling wafers in harsh processing environments.

Zerodur Ceramic Pin Chucks: Our ultra-flat Zerodur ceramic pin chucks are designed for processes involving heat sources, such as laser annealing. They maintain tight global and local flatness under adverse environmental conditions. Services include providing new Zerodur chucks, reconditioning legacy models, and modifying or redesigning chucks to meet unique requirements.

Our wafer chuck tables, electrostatic chucks, and heaters are integral components in semiconductor equipment across various processes, from front-end to back-end manufacturing. Our solutions support the rapid development of the semiconductor industry and are designed to handle ultra-thin and flexible wafers.

Learn More:

Visit www.semixicon.com or contact us at sales@semixicon.com

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