SEMIXICON, a U.S.-based manufacturer and supplier of high-precision Aluminum Nitride (AlN) Wafer Chucks

SEMIXICON, a U.S.-based manufacturer and supplier of high-precision Aluminum Nitride (AlN) Wafer Chucks, specializes in customizable, ultra-flat, and thermally stable solutions for semiconductor, CMP, and wafer-handling applications. Our 12-inch Aluminum Nitride Wafer Chucks are designed for high-performance thermal management and precision wafer processing with the following specifications:

Diameter: 300mm ±0.2mm

Thickness: 1000µm ±3µm (critical for precision processing)

C-type edge cut for optimized wafer alignment

Warpage: <50µm for enhanced surface flatness

TTV (Total Thickness Variation): <5µm for uniform wafer contact

Particle after cleaning: @ 10µm <20ea, ensuring low contamination

Double-side polishing: Ra <5nm for ultra-smooth surfaces

SEMIXICON’s AlN wafer chucks offer high thermal conductivity, excellent wear resistance, and superior mechanical strength, making them ideal for CMP polishing, vacuum chucks, and advanced semiconductor processing.

For more details, please visit www.semixicon.com or contact sales@semixicon.com


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