SEMIXICON – U.S.-Based Supplier of High-Performance Electrostatic Chucks (E-Chucks/ESCs)

SEMIXICON – U.S.-Based Supplier of High-Performance Electrostatic Chucks (E-Chucks/ESCs)

Electrostatic Chucks (E-Chucks/ESCs) use electrostatic force to securely clamp wafers, thin films, and delicate substrates without mechanical stress—making them critical for precision semiconductor manufacturing.

Why Choose SEMIXICON E-Chucks?

✔ Non-Contact Clamping – Zero physical pressure, ideal for ultra-thin wafers & fragile materials

✔ High Uniformity – Ensures consistent thermal & electrical performance

✔ Customizable Designs – Optimized for CVD, etching, lithography & more

✔ Compatibility – Works with semiconductor, FPD, and advanced packaging equipment

🔬 Key Specifications

Clamping Force: 50–500 mbar (adjustable for process needs)

Temperature Range: -50°C to +500°C (with optional active cooling/heating)

Material Options: Alumina (Al₂O₃), Aluminum Nitride (AlN), SiC, or custom ceramics

Surface Flatness: <1µm for precision wafer handling

Voltage Range: 200V–2000V (DC or RF-biased)

Low Outgassing – Critical for high-vacuum environments

🚀 Applications in Semiconductor & Beyond

✅ Semiconductor Fabrication – Wafer handling in CVD (PECVD, ICPCVD), ALD, etching (RIE, ALE)

✅ Photolithography – Secure clamping for high-resolution patterning

✅ Ion Beam Deposition (IBD) – Stable hold under high-energy processes

✅ Flat Panel Display (FPD) Manufacturing – Damage-free handling of large glass substrates

🔧 Custom Solutions Available

Multi-Zone Heating/Cooling E-Chucks

High-Speed ESC for Wafer Transfer

Refurbishment & Reconditioning of Legacy Chucks

📩 Contact SEMIXICON Today!

🌐 Explore more: www.semixicon.com

✉ Email: sales@semixicon.com

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