SemiXicon AIN ceramic heater, wafer chuck

  SEMIXICON – High-Performance Thermal Chucks & AlN Ceramic Heaters for Precision Wafer Bonding & Semiconductor Applications SEMIXICON supplies advanced Aluminum Nitride (AlN) ceramic heaters engineered for ultra-precise wafer bonding (homoepitaxial & heteroepitaxial), semiconductor manufacturing, and advanced packaging. Our high-purity AlN heating units deliver exceptional thermal uniformity, low thermal stress, and superior electrical insulation for critical CVD, annealing, lithography, and 3D IC fabrication. Key Specifications & Properties ✔ Material Composition • High-purity AlN ceramic (>99% purity) – Optimal for semiconductor-grade performance ✔ Thermal Performance • Thermal Conductivity: 170–230 W/m·K – Ensures rapid, uniform heat distribution • CTE: ~4.6 × 10⁻⁶/K – Matches silicon wafers, minimizing wafer warping & cracking ✔...

SEMIXICON – DLC-Coated Ceramic Wafer Chuck Tables for Semiconductor Ashing Applications Diamond-Like Carbon Coating | Porous Ceramic Chucks | Wafer Ashing | Semiconductor Process Equipment | Ultra-Durable Wafer Handling Solutions SEMIXICON, a leading supplier of DLC-coated wafer chuck tables, delivers high-performance ceramic chucks engineered for semiconductor wafer ashing, plasma processing, and vacuum etch systems. Our DLC (Diamond-Like Carbon) coated alumina ceramic chucks provide industry-leading surface hardness, low friction, and chemical resistance—perfect for today’s most demanding fab environments. 🔧 Key Features of SEMIXICON DLC-Coated Wafer Chuck Tables: Extreme Surface Hardness: DLC coating reaches up to 80 GPa, extending the chuck table lifespan under abrasive conditions Ultra-Low Friction: Coefficient as low as 0.05, reducing particle generation and wear during wafer rotation Thermal & Chemical Resistance: Excellent performance in plasma ashing, etching, and vacuum ...

Wafer Grinder/Polisher Chuck Tables & Components for DISCO DGP/DFG Series – Made by SEMIXICON Refurbishment | Custom Manufacturing | Modification | Ceramic Chuck Tables | DISCO Equipment Support SEMIXICON, a U.S.-based manufacturer specializing in high-precision semiconductor wafer chuck tables, proudly offers refurbishing, custom fabrication, and modification services for components used in DISCO DGP/DFG series automatic wafer grinders and polishers. We provide new and refurbished grinder/polisher components compatible with the following models: Supported DISCO Equipment: DGP8761 / DGP8760 – Fully Automatic Wafer Grinder & Polisher DFG8560 / DFG8540 / DFG8640 / DFG8830 / DFG8340 – DISCO Grinder Series DAG810 – Single-axis grinder system *** Available Components Made or Refurbished by SEMIXICON: Grinding Chuck Tables (including LNNR-510011-3 for DGP8761) Spinner Tables Mounting Tables Peeling Tables T Arms Air Floating Pads Robot Pick Units Precision Ceramic Bases We support: ...