SEMIXICON – DLC-Coated Ceramic Wafer Chuck Tables for Semiconductor Ashing Applications

SEMIXICON – DLC-Coated Ceramic Wafer Chuck Tables for Semiconductor Ashing Applications

Diamond-Like Carbon Coating | Porous Ceramic Chucks | Wafer Ashing | Semiconductor Process Equipment | Ultra-Durable Wafer Handling Solutions

SEMIXICON, a leading supplier of DLC-coated wafer chuck tables, delivers high-performance ceramic chucks engineered for semiconductor wafer ashing, plasma processing, and vacuum etch systems. Our DLC (Diamond-Like Carbon) coated alumina ceramic chucks provide industry-leading surface hardness, low friction, and chemical resistance—perfect for today’s most demanding fab environments.

🔧 Key Features of SEMIXICON DLC-Coated Wafer Chuck Tables:

Extreme Surface Hardness: DLC coating reaches up to 80 GPa, extending the chuck table lifespan under abrasive conditions

Ultra-Low Friction: Coefficient as low as 0.05, reducing particle generation and wear during wafer rotation

Thermal & Chemical Resistance: Excellent performance in plasma ashing, etching, and vacuum chamber applications

Porous Ceramic Chuck Design: Optimized airflow for stable wafer handling, heat dissipation, and vacuum performance

Customizable Dimensions: Tailored to 200mm / 300mm wafers and process-specific requirements

🧠 Applications:

Semiconductor Wafer Ashing Systems

Dry Etching & Plasma Cleaning Equipment

Wafer Spin Systems & Vacuum Load Ports

IC Packaging & MEMS Manufacturing

✅ SEMIXICON:

Fast lead times & reliable quality

Expert in porous alumina ceramic and DLC surface engineering

Custom machining and retrofitting services for OEM and legacy tool platforms

Trusted by fabs and OEMs across the semiconductor supply chain

📩 Request a Quote, Sample, or Custom Design Today

🌐 www.semixicon.com | ✉ sales@semixicon.com

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